Two types of vacuum gauges measure the pressure in specific regions of the vacuum manifold.

  • Convectron pressure gauge—Measures pressure down to a fraction of a milliTorr (mTorr). The instrument uses two convection gauges
    • Source pressure gauge—Measures the pressure in the RF lens and ion transfer tube region in the vacuum manifold.
    • Collision gas pressure gauge—Measures the pressure in the collision cell.
  • Ionization gauge—Measures the pressure in the analyzer region of the vacuum manifold. To measure the pressure, the ionization gauge produces energetic electrons that cause the ionization of residual molecules. A collector attracts positive ions formed in the ionization gauge, and the collector current is related to the pressure in the vacuum manifold. The ionization gauge is also involved in vacuum protection.

In the Tune application, you can observe the readback values for the vacuum gauges in the Status pane (under Vacuum) on the By Function page.