The following figure shows the vacuum manifold with the top cover plates removed next to the turbomolecular pump. The vacuum manifold is a thick-walled, aluminum chamber that encloses the API source interface, ion optics, mass analyzer, and ion detection system assemblies. It has multiple removable top cover plates, various electrical feedthroughs, and gas inlets.

Figure Placement of the turbomolecular pump next to the vacuum manifold
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No.DescriptionNo.Description

1

API source interface

6

Q2 collision cell

2

RF lens and ion transfer tube chamber

7

Q3 mass analyzer chamber

3

MP00 ion optics chamber

8

Ion detector

4

MP0 ion optics chamber (also known as Q0)

9

Turbomolecular pump

5

Q1 mass analyzer chamber

The following table lists the typical pressures in region 2 (which is evacuated by the forepump or forepumps) and region 5 (which is evacuated by the triple-inlet turbomolecular pump).

Table Typical pressures in regions 2 and 5

Model

Region 2
Source pressure readback

Region 5
Analyzer pressure readback

TSQ Altis Plus

3–4 Torr

3–7 × 10–6 Torr

TSQ Quantis Plus

1–2 Torr

2–6 × 10–6 Torr

TSQ Fortis Plus

1–2 Torr

1–6 × 10–6 Torr

TSQ Altis

3–4 Torr

3–7 × 10–6 Torr

TSQ Quantis

1–2 Torr

2–6 × 10–6 Torr

TSQ Fortis

1–2 Torr

1–6 × 10–6 Torr

TSQ Quantiva

2–6 × 10–6 Torr

3–7 × 10–6 Torr

TSQ Endura

3–7 × 10–6 Torr

2–6 × 10–6 Torr