The following figure shows the vacuum manifold with the top cover plates removed next to the turbomolecular pump. The vacuum manifold is a thick-walled, aluminum chamber that encloses the API source interface, ion optics, mass analyzer, and ion detection system assemblies. It has multiple removable top cover plates, various electrical feedthroughs, and gas inlets.
| No. | Description | No. | Description |
|---|---|---|---|
1 | API source interface | 6 | Q2 collision cell |
2 | RF lens and ion transfer tube chamber | 7 | Q3 mass analyzer chamber |
3 | MP00 ion optics chamber | 8 | Ion detector |
4 | MP0 ion optics chamber (also known as Q0) | 9 | Turbomolecular pump |
5 | Q1 mass analyzer chamber |
The following table lists the typical pressures in region 2 (which is evacuated by the forepump or forepumps) and region 5 (which is evacuated by the triple-inlet turbomolecular pump).
Model | Region 2 | Region 5 |
|---|---|---|
TSQ Altis Plus | 3–4 Torr | 3–7 × 10–6 Torr |
TSQ Quantis Plus | 1–2 Torr | 2–6 × 10–6 Torr |
TSQ Fortis Plus | 1–2 Torr | 1–6 × 10–6 Torr |
TSQ Altis | 3–4 Torr | 3–7 × 10–6 Torr |
TSQ Quantis | 1–2 Torr | 2–6 × 10–6 Torr |
TSQ Fortis | 1–2 Torr | 1–6 × 10–6 Torr |
TSQ Quantiva | 2–6 × 10–6 Torr | 3–7 × 10–6 Torr |
TSQ Endura | 3–7 × 10–6 Torr | 2–6 × 10–6 Torr |