The vacuum hose assembly connects the forepump to the MS.
IMPORTANT
Ensure that there is sufficient air clearance around the forepump to prevent overheating. For more information, refer to the forepump manufacturer’s manual.
The following figure shows the vacuum hose connection between the forepump and the MS.
NOTE
The vacuum hose assembly (P/N B51000135) comes preassembled from the factory. However, the following figure shows an expanded view of the hose components for demonstration purposes.
| No. | Description | No. | Description |
|---|---|---|---|
1 | Vacuum port on MS | 4 | Reducer fitting |
2 | Swing clamp | 5 | Preassembled vacuum hose assembly |
3 | Centering ring | 6 | Vacuum port on forepump |
Required Materials
Item | Quantity |
|---|---|
Preassembled vacuum hose assembly | 1 |
Reducer fitting | 1 |
Centering ring | 2 |
Swing clamp | 2 |
Procedure
- Using a centering ring, swing clamp, and reducer fitting, connect one end of the vacuum hose assembly to the vacuum port that is located on the left side of the MS.
- Using a centering ring, swing clamp, connect the opposite end of the vacuum hose assembly to the vacuum port that is located on the top of the forepump.
- Place the forepump under the instrument table or within 2.4 m (8 ft) of the instrument.