The following two types of vacuum gauges measure the pressure in specific regions of the vacuum manifold:

  • Convectron pressure gauge: The instrument utilizes the following two convectron gauges which measure pressure down to a fraction of a milliTorr (mTorr):
    • Source pressure gauge: Measures the pressure in both the RF lens and the ion transfer tube region in the vacuum manifold.
    • Collision gas pressure gauge: Measures the pressure in the collision cell.
  • Ionization gauge: Measures the pressure in the analyzer region of the vacuum manifold by producing energetic electrons that ionize residual molecules. A collector attracts positive ions formed in the ionization gauge, and the collector current is related to the pressure in the vacuum manifold. The ionization gauge is also involved in vacuum protection.

NOTE

You can observe the readback values for the vacuum gauges in the Tune application by opening the Status pane and browsing to By Board → Source.